i. Substrate Rotation Controller P/N SCX11, HSN 854390, ii. Substrate Rotation Driver P/N ARD36BV-K, HSN 854390, iii. Target Motor Driver P/N AZD-KD, HSN 854390 and iv. Tilt Motor Driver P/N AZD-KD, HSN 854390 (Tender №76996140)

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